• Pressure reducing regulators
• Back pressure regulators
• Vaporizing Regulator
• Automatic Switchover System
• Manual/Pneumatic Valves

AP Tech, also known as Advanced Pressure Technology, manufactures a wide array of gas handling components used exclusively for semiconductor wafer fabrication.


• Automatically switches from one cylinder to another when the primary cylinder empties

• Allows changing of cylinders during operation

• Simple, worry free, pressure based system

• Vacuum to 3,500 psig (241 bar) inlet, 250 psig (17 bar) outlet

• Flow capacity* to 50 slpm (1.8 scfm)

• Stainless Steel or Brass construction

Pressure Regulators

AP Tech manufactures a wide variety of pressure regulators including UHP single stage, two stage, springless single stage, process control NPT single stage, NPT two stage and NPT back pressure.

Springless Diaphragm Valves

AP Tech manufactures a wide variety of springless diaphragm valves including air actuated diaphragm valves, manual diaphragm valves and lockout devices

Additional Info

Pressure regulators, valves, check valves and a variety of flow devices are available for applications ranging from the source cylinder cabinet, bulk delivery systems through point of use including VMB distribution boxes and process tool gas trays. Products can be tailored for specific needs with custom fittings, dimensions, porting or testing with an option of multi-port, monoblock and surface mount configurations.